Volume 23, Issue 1, May 2016, Pages 158–164
C.T. Kalaivani1, S. Praveen Kumar2, and R. Ramesh3
1 Assistant Professor, Department of Electronics and Communication Engineering, Saveetha Engineering College, Chennai, India
2 Assistant Professor, Department of Electronics and Communication Engineering, Saveetha Engineering College, Chennai, India
3 Assistant Professor, Department of Electronics and Communication Engineering, Saveetha Engineering College, Chennai, India
Original language: English
Copyright © 2016 ISSR Journals. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
The micro mirror is a versatile MEMS device which is mainly used for light deflection and control. The micro mirror state is controlled by applying voltage between the electrodes around the mirror arrays. Electrostatic actuation is the methodology used for precise control of mirrors. We have designed arrays of electrode of different dimension which produces different tilting angle. We have analyzed that when aspect ratio of fixed electrode is increased corresponding tilting angle get increased linearly. Also, analyzed that when applied voltage increases corresponding tilting angle gets increased. The micro mirror is designed and the deflection value is simulated by using COMSOL Multi physics Software.
Author Keywords: MOEMS, MEMS mirror, electrostatic actuation, array of electrodes, COMSOL Multi physics.
C.T. Kalaivani1, S. Praveen Kumar2, and R. Ramesh3
1 Assistant Professor, Department of Electronics and Communication Engineering, Saveetha Engineering College, Chennai, India
2 Assistant Professor, Department of Electronics and Communication Engineering, Saveetha Engineering College, Chennai, India
3 Assistant Professor, Department of Electronics and Communication Engineering, Saveetha Engineering College, Chennai, India
Original language: English
Copyright © 2016 ISSR Journals. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Abstract
The micro mirror is a versatile MEMS device which is mainly used for light deflection and control. The micro mirror state is controlled by applying voltage between the electrodes around the mirror arrays. Electrostatic actuation is the methodology used for precise control of mirrors. We have designed arrays of electrode of different dimension which produces different tilting angle. We have analyzed that when aspect ratio of fixed electrode is increased corresponding tilting angle get increased linearly. Also, analyzed that when applied voltage increases corresponding tilting angle gets increased. The micro mirror is designed and the deflection value is simulated by using COMSOL Multi physics Software.
Author Keywords: MOEMS, MEMS mirror, electrostatic actuation, array of electrodes, COMSOL Multi physics.
How to Cite this Article
C.T. Kalaivani, S. Praveen Kumar, and R. Ramesh, “DESIGN AND COMPARISON OF ELECTROSTATICALLY ACTUATED MICRO MIRROR WITH DIFFERENT ASPECT RATIO,” International Journal of Innovation and Scientific Research, vol. 23, no. 1, pp. 158–164, May 2016.
